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The science and engineering of microelectronic fabrication /

Campbell, Stephen A., 1954-

The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - xiv, 603 pages : illustrations ; 24 cm. - The Oxford series in electrical and computer engineering . - The Oxford series in electrical and computer engineering .

Sumbangan

Includes bibliographical references and index.

ISBN: 0195136055

Subjects--Topical Terms:
Semiconductors--Design and construction

Dewey Class. No.: 621.38152

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