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Introduction to microelectronic fabrication / Richard C. Jaeger.

By: Material type: TextTextSeries: Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5.Publisher: Upper Saddle River, N.J. : Prentice Hall, 2002Copyright date: ©2002Edition: 2nd edDescription: xiv, 316 pages : illustrations ; 24 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 0201444941
Subject(s): DDC classification:
  • 621.39/5 21
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