TY  - BOOK
AU  - Xiao,Hong
TI  -  Introduction to semiconductor manufacturing technology
SN  - 0131911368
U1  - 621.381 23
PY  - 2001///
CY  - Upper Saddle River
PB  - Prentice Hall
KW  - Semiconductors
KW  - Design And Construction
KW  - Semiconductor Industry
N1  - Includes index
ER  -