Campbell, Stephen A.,  1954- <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell. 
 - 2nd ed. 
 - xiv, 603 pages :  illustrations ;  24 cm. 
 - The Oxford series in electrical and computer engineering .
 - The Oxford series in electrical and computer engineering .
<br/><br/> Sumbangan 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152