Jaeger, Richard C., <br/><br/>
Introduction to microelectronic fabrication / 
Richard C. Jaeger. 
 - 2nd ed. 
 - xiv, 316 pages :  illustrations ;  24 cm. 
 - Modular series on solid state devices ;  v. 5 .
 - Modular series on solid state devices (Upper Saddle River, N.J.) ;  v. 5. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0201444941  RM175.56 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration--Design and construction--Textbooks.
<br/><br/><label>Dewey Class. No.: </label>621.39/5