Principles of MEMS / 
 Principles of Microelectromechanical systems. 
edited by Ki Bang Lee. 
 - xii, 667 pages :   illustrations ;  25 cm 
<br/><br/>Includes bibliographical references and index  
<br/><br/><label>ISBN: </label>9780470466346   RM542.44 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Dewey Class. No.: </label>621.381