| 000 | 01438cam a22003614i 4500 | ||
|---|---|---|---|
| 001 | 12195911 | ||
| 003 | OSt | ||
| 005 | 20231228165305.0 | ||
| 008 | 001005s2001 nyua b 001 0 eng | ||
| 020 | _a0195136055 | ||
| 039 |
_c20231228165240.0 _h25 _iNur Dalila binti Azhari |
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| 040 |
_aLOC _cLOC _beng _erda |
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| 082 | 0 | 4 |
_a621.38152 _223 |
| 090 | 0 | 0 |
_a621.38152 _bCAM |
| 100 | 1 |
_aCampbell, Stephen A., _d1954- _eauthor. |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell. |
| 250 | _a2nd ed. | ||
| 264 | 1 |
_aNew York : _bOxford University Press, _c2001 |
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| 300 |
_axiv, 603 pages : _billustrations ; _c24 cm. |
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| 336 |
_2rdacontent _atext |
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| 337 |
_2rdamedia _aunmediated |
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| 338 |
_2rdacarrier _avolume |
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| 490 | 4 | _aThe Oxford series in electrical and computer engineering | |
| 500 | _aSumbangan | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 1 | 0 |
_aSemiconductors _xDesign and construction |
| 830 | 4 | _aThe Oxford series in electrical and computer engineering | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cKPT |
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| 999 |
_c13695 _d13695 |
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