| 000 | 01096cam a2200301 i 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20250304143826.0 | ||
| 008 | 020116s2002 njua b 101 0 eng d | ||
| 020 |
_a0201444941 _cRM175.56 |
||
| 039 | 9 |
_c20250304143209.0 _h25 _iNur Dalila binti Azhari |
|
| 040 |
_aDLC _cDLC _dDLC _beng _erda |
||
| 082 | 0 | 4 |
_a621.39/5 _221 |
| 090 | 0 | 0 |
_a621.395 _bJAE |
| 100 | 1 |
_aJaeger, Richard C., _eauthor. _914640 |
|
| 245 | 1 | 0 |
_aIntroduction to microelectronic fabrication / _cRichard C. Jaeger. |
| 250 | _a2nd ed. | ||
| 264 | 1 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _c2002. |
|
| 264 | 4 | _c©2002. | |
| 300 |
_axiv, 316 pages : _billustrations ; _c24 cm. |
||
| 336 |
_2rdacontent _atext |
||
| 337 |
_2rdamedia _aunmediated |
||
| 338 |
_2rdacarrier _avolume |
||
| 490 | 1 |
_aModular series on solid state devices ; _vv. 5 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 1 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction _vTextbooks. _914643 |
| 830 | 0 |
_aModular series on solid state devices (Upper Saddle River, N.J.) ; _vv. 5. _914646 |
|
| 942 |
_2ddc _cBK |
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| 999 |
_c15651 _d15651 |
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