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The science and engineering of microelectronic fabrication / Stephen A. Campbell.

By: Material type: TextTextSeries: The Oxford series in electrical and computer engineeringPublisher: New York : Oxford University Press, 2001Edition: 2nd edDescription: xiv, 603 pages : illustrations ; 24 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 0195136055
Subject(s): DDC classification:
  • 621.38152 23
Online resources:
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Holdings
Item type Current library Collection Call number Status Date due Barcode
Koleksi Pinjaman Terhad (Buku bertanda Merah) Koleksi Pinjaman Terhad (Buku bertanda Merah) PERPUSTAKAAN POLITEKNIK TUANKU SYED SIRAJUDDIN RAK 23 Koleksi Pinjaman Terhad (Buku bertanda Merah) RED 621.3815 CAM (Browse shelf(Opens below)) Available 0000005962
Koleksi Umum (Rak Terbuka) Koleksi Umum (Rak Terbuka) PERPUSTAKAAN POLITEKNIK TUANKU SYED SIRAJUDDIN RAK 11 Koleksi Umum (Rak Terbuka) OS 621.3815 CAM (Browse shelf(Opens below)) Available 0000005973
Koleksi Umum (Rak Terbuka) Koleksi Umum (Rak Terbuka) PERPUSTAKAAN POLITEKNIK TUANKU SYED SIRAJUDDIN RAK 11 Koleksi Umum (Rak Terbuka) OS 621.3815 CAM (Browse shelf(Opens below)) Available 0000005974

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Includes bibliographical references and index.

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